The fundamental issue is the concentration of airborne particles in the cleanroom. Particles can be affected by every component that has contact with the cleanroom, from the mechanical and electrical components down to the type of paper that may be used and including everything in between: walls, floors, ceilings, how the structure integrates with other components, and so on.
The new ISO standard defines a cleanroom as:
«a room in which the concentration of airborne particles is controlled, and which is constructed and used in a manner to minimise the introduction, generation, and retention of particles inside the room, and in which other relevant parameters, e.g. temperature, humidity, and pressure, are controlled as necessary».
|
Cleanroom
Classification
|
Concentration (particles/metre³) > or = Size Shown |
FS 209E |
ISO
14644-1 |
0.1 µm |
0.2 µm |
0.3 µm |
0.5 µm |
1.0 µm |
5.0 µm |
N/A |
1 |
10 |
2 |
|
|
|
|
N/A |
2 |
100 |
24 |
10 |
4 |
|
|
1 |
3 |
1,000 |
237 |
102 |
35 |
8 |
|
10 |
4 |
10,000 |
2,370 |
1,020 |
352 |
83 |
|
100 |
5 |
100,000 |
23,700 |
10,200 |
3,520 |
832 |
29 |
1,000 |
6 |
1,000,000 |
237,000 |
102,000 |
35,200 |
8,320 |
293 |
10,000 |
7 |
|
|
|
352,000 |
83,200 |
2,930 |
100,000 |
8 |
|
|
|
3,520,000 |
832,000 |
29,300 |
N/A |
9 |
|
|
|
35,200,000 |
8,320,000 |
293,000 |
|